By Srinivasan Sivaram
In early 1987 i used to be trying to improve a CVD-based tungsten procedure for Intel. At each step ofthe improvement, details that we have been gathering needed to be analyzed in gentle of theories and hypotheses from books and papers in lots of unrelated matters. Thesesources have been so broadly diverse that I got here to gain there has been no unifying therapy of CVD and its subprocesses. extra apparently, my colleagues within the have been from many disciplines (a floor chemist, a mechanical engineer, a geologist, and an electric engineer werein my group). to assist us comprehend the sector of CVD and its avid gamers, a few of us prepared the CVD user's staff of Northern California in 1988. the assumption for writing a booklet at the topic happened to me in the course of that point. I had already equipped my options for a direction I taught at San Jose country collage. Later Van Nostrand agreed to submit my publication as a textual content meant for college students on the senior/first yr graduate point and for strategy engineers within the microelectronics undefined, This e-book isn't meant to be bibliographical, and it doesn't hide each new fabric being studied for chemical vapor deposition. however, it does current the foundations of CVD at a primary point whereas uniting them with the desires of the microelectronics undefined.
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